trichlorosilane
CAS NO.10025-78-2
M.F:HCl3Si
M.W:135.44
Appearance:colorless liquidPurity:>99%
Used for other chamicals
The detailed specifications are as below:
| Appearance | Colorless Transparent volatile Liquid | |
| The content of Trichlorosilane % ≥ | 99.5 | 98.0 |
| The content of Dichlorosilane % ≤ | 0.20 | 0.50 |
| The content of tetrachlorosilane % ≤ | 0.25 | 0.70 |
| The content of Chlorine silane polymer,% ≤ | 0.05 | 0.30 |
| The content of boron % ≤ | 0.00001 | 0.00005 |